冯波

基本信息      冯波，湖南大学粤港澳大湾区创新研究院副研究员、机械与运载工程学院助理教授，岳麓学者。2021年于复旦大学信息科学与工程学院获得博士学位；随后就职于上海华为技术有限公司，担任高级工程师和PD技术高校合作项目经理（2021.07-2022.12）。2022年12月加入湖南大学，主要研究方向为：摩尔定律“3nm”及以下节点先进光刻、背部供电与3D集成技术。目前发表SCI论文20余篇，其中第一/通讯作者10余篇，包括Nano Letters, International Journal of Extreme Manufacturing, ACS Nano等权威期刊，申请发明专利10余项。受邀担任International Journal of Extreme Manufacturing，Nanoscal Research Letters, Microelectronic engineering等国际期刊审稿人。入职仅1+年，已主持华为xxx技术开发项目、国家自然科学基金-青年基金及湖南大学科研启动经费等众多项目。 -------------------------------------------------------------------------------------------------------------------------- 欢迎对集成电路工艺、材料和半导体装备感兴趣的研究生、本科生加入“3D集成工艺与器件团队”。 课题组每年计划招收硕士研究生3-5名，请联系fengbo36@hnu.edu.cn; TEL：13120585212。

教育背景

研究方向 1. 集成电路先进背部供电技术 2. 多电子束光刻装备（Multiple-EBL）与工艺 3. 3D集成器件：硅基EUV探测器、InGaAs偏振探测芯片 4. nanoTSV、Mo/Ru ALD填充、混合键合、极端减薄等集成工艺

工作履历

学习经历 2016-09至2021-06，复旦大学，微电子学与固体电子学，博士研究生 2012-09至2016-06，湖南大学，电子科学与技术，大学本科

研究领域

工作经历 2023-01 至 今，湖南大学，粤港澳大湾区创新研究院（广州增城），副研究员 2022-12 至 今，湖南大学，机械与运载工程学院，岳麓学者、助理教授 2021-07至 2022-12，上海华为技术有限公司，高级工程师

学术成果

代表性论著 科研论文 Zhiwen Shu, Bo Feng, Peng Liu, Lei Chen, Huikang Liang, Yiqin Chen, Jianwu Yu, Huigao Duan. Near-zero-adhesion-enabled intact wafer-scale resist-transfer printing for high-fidelity nanofabrication on arbitrary substrates, International Journal of Extreme Manufacturing, 2023, 6(015102) ( 共同第一作者 ) Chen Lei, Liu Peng, Feng Bo, et al. Dry-transferrable photoresist enabled reliable conformal patterning for ultrathin flexible electronics, Advanced Materials, 2023, 35, 2303513. Yu Zhou, Bo Feng, Lei Chen, Fu Fan, Zhiqiang Ji, and Huigao Duan, Wafer-Recyclable, Eco-Friendly, and Multiscale Dry Transfer Printing by Transferable Photoresist for Flexible Epidermal Electronics, ACS Applied Materials & Interfaces, https://doi.org/10.1021/acsami.3c18576. Dongxu Ma, MingJi, Hongbo Yi, Qingyu Wang, Fu Fan, Bo Feng, Mengjie Zheng, Yiqin Chen, Huigao Duan. Pushing the thinness limit of silver films for f lexible optoelectronic devices via ion-beam thinning-back process, Nature Communications, 2024, 15:2248. Bo Feng, et al. A Broadband Photoelectronic Detector in a Silicon Nanopillar Array with High Detectivity Enhanced by a Monolayer Graphene, Nano Letters, 2021, 21 (13), 5655-5662. Bo Feng, et al. Precision Integration of Grating Based Polarizers onto Focal Plane Arrays of Near-Infrared Photovoltaic Detectors for Enhanced Contrast Polarimetric Imaging, International Journal of Extreme Manufacturing, 2021, 3, 035201.  Bo Feng, et al. Achieving Infrared Detection by All-Si Plasmonic Hot-Electron Detectors with High Detectivity, ACS Nano, 2019, 13, 8433−8441.  Bo Feng, et al. All-Si Photodetectors with a Resonant Cavity for Near-Infrared Polarimetric Detection, Nanoscale Research Letters, 2019, 14:39. Bo Feng, et al. Generation of Terahertz Hollow Beams by a Photonic Quasi-Crystal Flat Lens, Applied Physics Express 9, 062003 (2016).10. Bo Feng, et al. Nanofabrication of Silicon Nanowires with High Aspect Ratio for Photoelectron Sensing, Microelectronic Engineering, 2019, 195: 139-144.  Duo Sun, Bo Feng, et al, Design and Fabrication of an InGaAs Focal Plane Array Integrated with Linear-Array Polarization Grating, Optics Letters, 45, 1559-1562 (2020).  Zongyao Yang, Bo Feng, et al, Optimization Study of Metallic Sub-wavelength Gratings as the Polarizer in Infrared Wavelengths, Applied Optics 59, No. 5 / 10 February 2020.  Zongyao Yang, Bo Feng, et al, A Study of Nano-structural Effect on the Polarization Characteristics of Metallic Sub-Wavelength Grating Polarizers in Visible Wavelengths, Microelectronic Engineering, 227 (2020) 111327. Bo Feng, et al, Monte Carlo simulation and processing study toward 2 nm HSQ single lines by electron beam lithography. 42th International Conference on Micro & Nano Engineering 2016. Bo Feng, et al, Nanofabrication of 4 nm Si nanowires by high resolution e-beam lithography for high-sensitive gas sensors. EIPBN 2017 International Program Committee. Bo Feng, et al, Process study of 4 nm Si nanowires by high resolution e-beam lithography for supersensitive sensors. ChinaNANO 2017. Bo Feng, et al, 4-nm conducting Si nanowires for gas sensors with ultra-high sensitivity (Poster). 43th International Conference on Micro & Nano Engineering 2018. Bo Feng, et al, A novel metasurface tuned Si nanowire detectors. 44th International Conference on Micro & Nano Engineering 2018. Bo Feng, et al, Nanofabrication of fan-shaped photonic crystal spectrometers with ultrahigh resolution in SOI for the infrared range. 45th International Conference on Micro & Nano Engineering 2019. Bo Feng; Tianyu Wang; Jingyuan Zhu; Yifang Chen ; Enhanced responsivity of PN junction solar cells through graphene modification layer, 45th International Conference on Micro & Nano Engineering 2019, Rhodes. 科研著作 科研专利成果 1. 冯波；黄飞凤；王彪；陈曌；陈鸿彬；王乾丞；段辉高；一种功能性纳米薄膜全干法转移方法,中国，2024-03-12，CN：202410277979.0 2. 冯波；王彪；黄飞凤；王乾丞；陈鸿彬；陈曌；陈艺勤；段辉高；一种X射线波带片过电镀金属层后道离子束回刻方法,中国，2024-03-12，CN202410277929.2 3. 冯波；黄飞凤；王彪；段辉高；一种应用于3D IC的正/背面套刻集成方法, 中国，2024-03-12，CN202410277927.3 4. 冯波；陈宜方 ; 鳍式光伏型硅基等离激元热载流子红外探测芯片及其制作方法, 2022-04-12, 中国,CN202011100898.1 5.  陈宜方; 冯波; 陆冰睿; 朱静远; 刘飞飞; 周磊 ; 多通道全硅基红外光热电探测器及其制作方法,2019-07-26, 中国, CN201910685026.7软件著作权