谢建兵

综合介绍 General Introduction       谢建兵，工学博士，教授，博士生导师。      现任西北工业大学机电学院微系统工程系主任（2020-）、微机电系统工程（首批国家一流本科专业建设点）专业负责人（2018-）。      主要研究方向为MEMS惯性传感器及MEMS制造技术。主持国家自然科学基金项目3项、科技委领域基金1项、国家863计划项目2项、国家重点研发计划子课题1项、华为联合项目1项、西安市科技计划项目1项；参与国家重点研发计划、863计划重点项目、国家重大仪器专项等20余项；发表SCI/EI论文20余篇，出版专著及教材5部；申请国家发明专利43项，其中已授权22项；制定国家标准1部；获国家技术发明奖二等奖1项、陕西省科学技术一等奖2项、中国机械工业科学技术一等奖1项、教育部技术发明奖二等奖1项；获得陕西省“三秦人才津贴”。 个人相册

教育教学

教育教学 Education and teaching 招生信息 教育信息 招生类型：博士研究生、硕士研究生招生专业：0802Z1微机电系统及纳米技术140100集成电路科学与工程085407仪器仪表工程       085501机械工程专业要求：      欢迎来自微机电系统工程、电子信息、自动控制、仪器仪表、机械电子等专业的学生报考。 “微机电系统工程”本科专业负责人      组织修订专业培养方案并建立了“设计一颗芯片、制造一颗芯片、应用一颗芯片”的课程体系，新建微传感器芯片设计、加工、测试等专业综合设计课程，使得学生能够使用千万元级的半导体设备亲手制作一颗微传感器芯片。主讲本科生课程：      微传感器与微执行器（双语）      微纳传感芯片设计综合设计      微机电系统设计与实践主讲博士生课程：      微机电系统导论      微纳设计理论与方法

荣誉获奖

获奖信息 The winning information 2019年，国家技术发明二等奖，航空航天特种MEMS制造技术及其应用；2017年，陕西省科学技术一等奖，高精度硅微机械陀螺及其工程化技术；2016年，教育部技术发明二等奖，特种MEMS制造技术及其应用；2009年，陕西省科学技术一等奖，MEMS集成设计工具技术及应用；2008年，中国机械工业科学技术一等奖，任意流程的微机电系统设计工具技术及应用；

科学研究

社会兼职 Social Appointments 全国微机电技术标准化技术委员会（SAC/TC336）委员；中国微米纳米技术学会微纳传感技术分会理事；中国仪器仪表学会量子传感与精密测量仪器分会理事；iCAN中国联盟理事会理事；国家科技专家库专家、国家自然科学基金同行评议专家、教育部学位中心评审专家；JMEMS、IEEE Sensors Journal、IEEE Transactions on Industrial Electronics、Micromachines、Microsystem Technologies、Sensors等国际期刊审稿人。

学术成果

科学研究 Scientific Research 主持科研项目：      华为联合项目：大带宽MEMS加速度计；      国家自然科学基金面上项目：面向无人机的微波超材料MEMS疏冰柔性结冰传感器阵列研究；      国家自然科学基金面上项目：环间嵌入电极的多环谐振式微机械陀螺关键技术研究；      国家自然科学基金青年项目：硅-玻璃-硅三层键合的微玻璃球壳谐振器制造方法研究；      国家重点研发计划项目子课题：MEMS系统级建模和优化等关键技术的集成；制定国家标准：      国家标准《硅基MEMS制造技术：基于SOI硅片的MEMS工艺规范》；

综合介绍

学术成果 Academic Achievements 发表论文：[1]    Jianbing Xie*, Junwu Chen, Zihan Li, Weizheng Yuan, Flexible microwave sensor films based on nested-complementary split ring resonator for liquid dielectric constant detection, Sensors and Actuators A: Physical, 359 (2023) 114461，DOI:10.1016/j.sna.2023.114461[2]    Jianbing Xie*, Junjie Wen, Junwu Chen, Weizheng Yuan, Microwave Icing Sensor Based on Interdigital-Complementary Split-Ring Resonator, IEEE SENSORS JOURNAL, 2022, 22(13), pp.12829-12837, DOI：10.1109/JSEN.2022.3176932(SCI: 000819823500046)[3]    Jianbing Xie*, Yiwei Wang, Rong Dong and Kai Tao,* Wearable Device Oriented Flexible and Stretchable Energy Harvester Based on Embedded Liquid-Metal Electrodes and FEP Electret Film, Sensors, 2020, 20(2), 458, DOI:10.3390/s20020458(SCI: 000517790100132)[4]    Jianbing Xie* , Yongcun Hao, Weizheng Yuan， Energy Loss in a MEMS Disk Resonator Gyroscope, Micromachines, 2019, 10(8), 493, DOI:10.3390/mi10080493 (SCI: 000482989700060)[5]    Jianbing Xie*, Lei Chen, Hui Xie, Jinqiu Zhou and Guangcheng Liu. The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator, Micromachines, 2018, 9(2), 1-11, DOI:10.3390/mi9020042 (SCI: 000427530300002)[6]    Jianbing Xie*, Jin Yang, Jinqiu Zhou and Weizheng Yuan, Vibrational Energy Loss Analysis of a MEMS Disk Resonator Gyroscope, Proceedings of 2018 IEEE/ASME International Conference On Advanced Intelligent Mechatronics (AIM), Jul 09-12, 2018, Auckland, New Zealand(ISTP: 000447254200065)[7]    Jianbing Xie*, Sen Ren, Qiang Shen, Lei Chen, Hui Xie, Weizheng Yuan. The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators. IEEE 8th International Nanoelectronics Conferences. p 45-46, JUN 20, 2018, Kuala Lumpur, Malaysia (ISTP: 000448323600023)[8]    Jianbing Xie*, Qiang Shen, Yongcun Hao, Honglong Chang, Weizheng Yuan, Design, fabrication and characterization of a low-noise z-axis micromachined gyroscope, Microsystem Technologies, 2015, 21(3), 625-630, DOI:10.1007/s00542-014-2068-0 (SCI: 000351278800015)[9]    Jianbing Xie*, Yongcun Hao, Qiang Shen, Honglong Chang, Weizheng Yuan, A dicing-free soi process for mems devices based on the lag effect, Journal of Micromechanics and Microengineering, 2013 (23) 125033, DOI:10.1088/0960-1317/23/12/125033(SCI: 000327437000033)[10] Jianbing Xie*, Yongcun Hao, Honglong Chang, Weizheng Yuan, Single mask selective release process for complex SOI mems device, Key Engineering Materials, vol.562, pp1116-1121, 2013(ISTP: 000324503700202)[11] Xie Jianbing, Song Meng, Yuan Weizheng, A high sensitivity micromachined accelerometer with an enhanced inertial mass soi mems process, proceedings of 8th IEEE International Conference On Nano/Micro Engineered And Molecular Systems (NEMS), pp336-339, suzhou, China, 2013.04.07-10 (ISTP: 000327183000068 )[12] Jianbing Xie*, Weizheng Yuan, Honglong Chang, Design and fabrication of MEMS gyroscopes on the SOI substrate with decoupled oscillation modes, Chinese Journal of Mechanical Engineering, 2010, 23 (1). pp. 16-20. (SCI: 000274451800003)[13] Jianbing Xie*，Weizheng Yuan，Honglong Chang, The application of notching effect in one-step dry etch and release process for the fabrication of mems，Nanotechnology and Precision Engineering, 2010 8(2). pp. 167-170. (EI: 20101912918782)[14]  Jianbing XIE*，Weizheng YUAN，Honglong CHANG，A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers, Proceedings of the 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. January 5-8, 2009, Shenzhen, China (ISTP:000273161500059)[15] Hao Wang, Xiupu Wang, Jianbing Xie*, First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope, Sensors, 2020, 20(22), 6455(SCI: 000594564300001)[16] Chuang Li, Jianbing Xie, Francisco Cordovilla, Jinqiu Zhou, R. Jagdheesh,José L. Oca？n, Design, fabrication and characterization of an annularly groovedmembrane combined with rood beam piezoresistive pressure sensorfor low pressure measurements, Sensors and Actuators A, 2018, 279: 525–536[17] Zhao Chun, Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, and Michael Kraft, “A Comparative Study of Output Metrics for a MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators”, IEEE/ASME Journal of Microelectromechanical Systems, 2016, 25(4):626-636.[18] Chun Zhao, Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, and Michael Kraft, “A Three Degree-of-Freedom Weakly Coupled Resonator Sensor with Enhanced Stiffness Sensitivity”, IEEE/ASME Journal of Microelectromechanical Systems, 2016, 25(1):38-51.[19] Chun Zhao, Graham S. Wooda, Jianbing Xie, Honglong Chang, Suan Hui Pu, Michael Kraft*, “A force sensor based on three weakly coupled resonators with ultrahigh sensitivity”, Sensors & Actuators A: Physical, 2015, 232: 151-162.[20] Mohammad Montaseri, Jianbing Xie, Honglong Chang, Chun Zhao, Graham Wood, Michael Kraft, “Atmospheric Pressure Mode Localization Coupled Resonators Stiffness Sensor”, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), ALASKA, June 21-25, 2015, pp: 1183-1186.[21] Chun Zhao,  Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, Michael Kraft, “Comparative Study of Different Output Metrics for A Three Weakly Coupled Resonator Sensor”, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), ALASKA, June 21-25, 2015, pp: 2196-2199.[22] Chun Zhao,  Graham S. Wood, Jianbing Xie, Honglong Chang, Suan Hui Pu, H.M.H. Chong, Michael Kraft, “A Sensor for Stiffness Change Sensing Based on Three Weakly Coupled Resonators with Enhanced Sensitivity”, The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, January 18-22, 2015, pp: 881-884.出版专著：      《MEMS集成设计技术及应用》；      《硅微机械陀螺误差建模理论与方法》；参编教材：      《微传感器创新应用实践》；      《微机电系统》(第2版)；      《传感器与测试技术》；